Course No.: 012042
Course Category: elective course of subject
Period/Credits: 32/2
Prerequisite: Advance Mathematics, Complex Function Foundation, Mathematical Statistics, College Physics, Electromagnetic Field Theory, Semiconductor Technology, and so on.
Aims & Requirements:
This course is an optional course for all master's degree students. It is necessary for students who want to work on micro-nano processing in the future. Through this course, students can learn more about the micro-nano processing technology for VLSI production, MEMS manufacturing, and nanotechnology research.
Primary Coverage
Chapter 1: Introduction
Micro-nano technology and micro/nano processing technology; basic process and classification of micro/nano processing
Chapter 2: Optical Exposure Technology
Optical exposure methods and principles; optical exposure process; characteristics of photoresist; design and manufacture of optical masks; short wavelength exposure technology; large numerical aperture and immersion exposure technology; optical exposure resolution enhancement technology;
Chapter 3: Electron Beam Exposure Technology
Electron optics principle; electron beam exposure system; electron beam exposure pattern design and data format; electron beam resist and its process
Chapter 4: Focused Ion Beam Processing Technology
Liquid metal ion source; focused ion beam system; scattering of ions in solid materials; principle of focused ion beam processing; application of focused ion beam processing technology; focused ion beam exposure technology; ion beam projection exposure technology;
Chapter 5: Scanning Probe Processing Technology
Scanner Probe Microscope Principles; Resist Exposure Processing; Oxidative Local Processing; Additive Nanofabrication; Extraction Nano-processing; High Yield Scanning Probe Processing
Chapter 6: Replication Technology
Hot-press nanoimprint technology; room temperature nanoimprint technology; UV-curable nanoimprint technology; nano-transfer technology; soft lithography technology; large area continuous imprint technology
